Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale
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DIC Calibration Example
The project is expected to realize a breakthrough in:
of the residual stress distribution at the (sub) micron scale.
The measurement techniques and the simulation tools will provide SMEs in particular with enabling technologies for the design and efficient production of innovative micro-devices with improved in-service performance and substantially reduce development costs.